Ti Dep

Ti is typically used as an adhesion layer in combination with other materials.


Available Tools:

Resistive Heater - Cleanroom

Often used in Secondary Source as adhesion layer

Resistive Heater - Glovebox

Approved for Source 2 location

E-beam - 4" and 6" Systems

Approved for any crubible location

DC Sputter System

Gun 2 Source - 30nm in 8min (0.2A)