Physical Vapor Deposition

Available Tools:

Resistive Heating - Cleanroom

Resistive Heating - Glovebox

E-beam - 4" System

E-beam - 6" System

Sputter - DC

 

 

  • Evaporation (Resistive Heating)

Material Wafer Diameter (inches) Deposition Rate (nm/sec) Measurement Method
Aluminum 4 & 6 0.6 Dektak
Titanium 4 & 6 0.3 Dektak
Chromium 4 & 6 TBD

  • Evaporation (Resistive Heating - Glovebox)

Material Wafer Diameter (inches) Deposition Rate (nm/sec) Measurement Method
Aluminum 4 & 6 and pieces 0.2 Dektak

  • Evaporation (4" E-Beam Evaporator)
  • Material Wafer Diameter (inches) Deposition Rate (nm/sec) Measurement Method
    Chromium 4 and small pieces 0.11 Crystal
    Copper 4 and small pieces 0.17 Crystal
    Titanium 4 and small pieces 0.04 Crystal
    Nickel 4 and small pieces 0.01 Crystal
    Gold 4 and small pieces 0.3 Crystal
    Silicon 4 and small pieces 0.17 Crystal

  • Evaporation (6" E-Beam Evaporator)
    • We are currently working on collecting data on the evaporation rates of standard materials.
  • DC Sputtering
    • We are currently working on collecting data on sputtering rates of standard metals.