Processes

NNF houses a large variety of standard equipment and processes that can be used for patterning, deposition and etching of thin films.  Please follow the links on the left to learn about different tools and processes.  The list below provides the names of the NNF Staff  responsible for operating the tools and training new users. Please contact the responsible NNF staff member directly if you have a process need or you simply need to ask a question about a tool or process.

 

 

CHEMICAL HOODS
Surface Preparation RCA Nicole Hedges
BOE - Nanostrip BOE Marcio Cerullo
BOE + HF Marcio Cerullo
Nanostrip Marcio Cerullo
Polysilicon Poly Etch
BD Etch Nicole Hedges
P Deglaze Nicole Hedges
Lift off NMP
Metal + SiN Etch Al Etch Nicole Hedges
Ti Etch Nicole Hedges
SiN Etch
Photoresist Develop NMP Harold Madsen
MF319 Harold Madsen
KOH Hood KOH Marcio Cerullo
THIN FILM DEPOSITION
Metal Deposition E-Beam Nicole Hedges
Resistive Heated Evaporation Nicole Hedges
Sputtering Nicole Hedges
IBAD Marcio Cerullo
Glovebox Nicole Hedges
LPCVD Polysilicon
Silicon Dioxide
Silicon Nitride
PECVD Solarex
Premitec
Si/SiGe Epitaxy UHV-RTCVD Epitaxy Nicole Hedges
ANNEALING Furnaces + RTA Nicole Hedges
LITHOGRAPHY MA6 Harold Madsen
E-Beam Lithography Harold Madsen
Nanoimprinter Harold Madsen
Spinners Harold Madsen
PLASMA ETCHING DRIE Marcio Cerullo
Plasma Therm Marcio Cerullo
TRION Marcio Cerullo
Semigroup Marcio Cerullo
MEASUREMENTS Nanometrics Harold Madsen
Ellipsometry Harold Madsen
Anechoic Chamber Marcio Cerullo
Dektak Nicole Hedges
Probe Station Marcio Cerullo
Hall Effect Marcio Cerullo
AFM Marcio Cerullo
FACILITY INFRASTRUCTURE DI Water Marcio Cerullo
Nitrogen Generation Marcio Cerullo
Gas Sensing Marcio Cerullo
Gowning
LAB SAFETY Marcio Cerullo