The NCSU Nanofabrication facility is located in the Larry K. Monteith Engineering Research Center, on North Carolina State University's Centennial Campus and it occupies a 7400 square feet class 100 and class 1000 cleanroom. The facility has a full range of micro and nano-fabrication capabilities including: photolithography, reactive ion etching (RIE), deep RIE, low pressure chemical vapour deposition (LPCVD), plasma enhanced CVD, rapid thermal anneal, thermal oxidation, solid source diffusion, thermal and e-beam evaporation, sputtering, chemical mechanical polishing, various wet etching and cleaning processes, along with various characterization tools. Many of the tools are capable of processing on a broad range of substrates such as semiconductor glass, ceramics, and plastics with sizes from small pieces to 6" wafers.
The facility provides:
The fabrication facility enjoys a close relationship with the Analytical Instrumentation Facility at NC State which offers state-of-the-art scanning and transmission electron microscopy as well as material analysis (SIMS, XPS, AES etc).