User Fees

For NCSU users, the monthly cap is $750 per student per project. For all other academic institutions, the monthly cap is $1250.

If processing for academic users is performed by the NNF staff, an additional staff rate of $51.61/hour is charged for all processes and this charge is not capped. The same rate rate also applies to all consulting, troubleshooting or any other work involving the NNF staff. The staff rate is $100/hour for industrial projects.

NNF offers free processing to new faculty and undergraduate students. To learn more about these programs, please go back to the home page and click on the "get started" button.

 Tool Academic Rates Industry Rates Minimum Time
NCSU Non-NCSU
Furnace C1: Forming Gas Anneal - High K $35.00/hr$50.00/hr$85.00/hr1.00 hr
Furnace C2: SiC$35.00/hr$50.00/hr$85.00/hr1.00 hr
Furnace C4: Forming Gas Anneal$35.00/hr$50.00/hr$85.00/hr1.00 hr
Furnace D1: Steam Oxidation$35.00/hr$50.00/hr$85.00/hr1.00 hr
Furnace D2: Boron Disk Doping$35.00/hr$50.00/hr$85.00/hr1.00 hr
Furnace D3: Dry Oxidation$35.00/hr$50.00/hr$85.00/hr1.00 hr
Furnace D4: Drive In Anneal$35.00/hr$50.00/hr$85.00/hr1.00 hr
Furnace: RTA (Heatpulse 210T)$35.00/hr$50.00/hr$85.00/hr1.00 hr
Furnace: RTA (Heatpulse 610)$35.00/hr$50.00/hr$85.00/hr1.00 hr
Glovebox: RH Evaporator$35.00/hr$50.00/hr$85.00/hr1.00 hr
Glovebox: Spinner$35.00/hr$50.00/hr$85.00/hr1.00 hr
Hoods: Acid Research (room 227)$35.00/hr$50.00/hr$85.00/hr1.00 hr
Hoods: Develop Photoresist$35.00/hr$50.00/hr$85.00/hr0.50 hr
Hoods: Equipment Clean$35.00/hr$50.00/hr$85.00/hr1.00 hr
Hoods: KOH$35.00/hr$50.00/hr$85.00/hr1.00 hr
Hoods: Liftoff$35.00/hr$50.00/hr$85.00/hr1.00 hr
Hoods: Metal etch, nitride etch$35.00/hr$50.00/hr$85.00/hr1.00 hr
Hoods: Nano strip, BOE$35.00/hr$50.00/hr$85.00/hr1.00 hr
Hoods: Poly, BD Etch, P deglaze$35.00/hr$50.00/hr$85.00/hr1.00 hr
Hoods: SC1&2, JTB$35.00/hr$50.00/hr$85.00/hr1.00 hr
Hoods: Solvent Research (Rm 227)$35.00/hr$50.00/hr$85.00/hr1.00 hr
Hoods: Spin Dryer$35.00/hr$50.00/hr$85.00/hr0.25 hr
Hoods: TNLC$35.00/hr$50.00/hr$85.00/hr1.00 hr
Hoods: Tube Etcher$35.00/hr$50.00/hr$85.00/hr1.00 hr
Internal Credit$1.00/run$1.00/run$1.00/run-
Metrology: Anechoic Chamber$35.00/hr$50.00/hr$85.00/hr1.00 hr
Metrology: Atomic Force Microscope$35.00/hr$50.00/hr$85.00/hr1.00 hr
Metrology: Ellipsometer (VASE)$35.00/hr$50.00/hr$85.00/hr0.50 hr
Metrology: Four Point Probe$35.00/hr$50.00/hr$85.00/hr0.25 hr
Metrology: General Microscope1$0.00/hr$0.00/hr$0.00/hr0.25 hr
Metrology: HP 4145$35.00/hr$50.00/hr$85.00/hr1.00 hr
Metrology: HP 4284A LCR$35.00/hr$50.00/hr$85.00/hr1.00 hr
Metrology: I-V & CV Station (1)$35.00/hr$50.00/hr$85.00/hr1.00 hr
Metrology: Keithley$35.00/hr$50.00/hr$85.00/hr1.00 hr
Metrology: Microscope 2 - TNLC$0.00/hr$0.00/hr$0.00/hr0.00 hr
Metrology: Photo Microscope$0.00/hr$0.00/hr$0.00/hr0.00 hr
Metrology: Photo Video Microscope$0.00/hr$0.00/hr$0.00/hr0.00 hr
Metrology: Profilometer - Dektak$35.00/hr$50.00/hr$85.00/hr0.50 hr
Metrology: Thickness (Nanometrics)$35.00/hr$50.00/hr$85.00/hr0.25 hr
Nanolithography: ASML 193 Scanner$250.00/hr$350.00/hr$1500.00/hr1.00 hr
Nanolithography: BioForce Enabler$35.00/hr$50.00/hr$85.00/hr1.00 hr
Nanolithography: NanoImprinter$35.00/hr$50.00/hr$85.00/hr1.00 hr
Photolithography: Blue M Oven$35.00/hr$50.00/hr$85.00/hr0.50 hr
Photolithography: Contact Aligner (MA6)$35.00/hr$50.00/hr$85.00/hr0.50 hr
Photolithography: Contact Aligner (MJB3)$35.00/hr$50.00/hr$85.00/hr1.00 hr
Photolithography: GCA Stepper$30.00/hr$100.00/hr$400.00/hr1.00 hr
Photolithography: Hot Plate (TNLC)$35.00/hr$50.00/hr$85.00/hr0.25 hr
photolithography:Headway Spin 1/Hot Plat$35.00/hr$50.00/hr$85.00/hr0.25 hr
Photolithography:Headway Spin2/Hot Plate$35.00/hr$50.00/hr$85.00/hr0.25 hr
Photolithography:Laurell Spin/Hot Plate$35.00/hr$50.00/hr$85.00/hr0.50 hr
Photololithography: Spin Track$250.00/hr$250.00/hr$500.00/hr0.50 hr
Plasma Processing: O2 clean - Asher$35.00/hr$50.00/hr$85.00/hr0.50 hr
RIE: Deep RIE$35.00/hr$50.00/hr$85.00/hr1.00 hr
RIE: Plasma therm$35.00/run$50.00/run$85.00/run-
RIE: Semigroup$35.00/hr$50.00/hr$85.00/hr1.00 hr
RIE: Trion Minilock$35.00/hr$50.00/hr$85.00/hr1.00 hr
Staff time/tool operation$51.61/hr$51.61/hr$100.00/hr0.00 hr
Thin Film Deposition: (Si/SiGe Epitaxy)$35.00/hr$50.00/hr$85.00/hr1.00 hr
Thin Film Deposition: 4$35.00/hr$50.00/hr$85.00/hr1.00 hr
Thin Film Deposition: 6 2$35.00/hr$50.00/hr$85.00/hr1.00 hr
Thin Film Deposition: DC Sputtering 1$35.00/hr$50.00/hr$85.00/hr1.00 hr
Thin Film Deposition: LPCVD Polysilicon$35.00/hr$50.00/hr$85.00/hr1.00 hr
Thin Film Deposition: LPCVD Si3N4$35.00/hr$50.00/hr$85.00/hr1.00 hr
Thin Film Deposition: LPCVD SiO2 3$35.00/hr$50.00/hr$85.00/hr1.00 hr
Thin Film Deposition: PECVD (Solarex)$35.00/hr$50.00/hr$85.00/hr1.00 hr
Thin Film Deposition: RH Evaporator$35.00/hr$50.00/hr$85.00/hr1.00 hr
Thin Film Deposition: Sputtering (NCSU)$35.00/hr$50.00/hr$85.00/hr1.00 hr
Thin Film Deposition:PECVD (Premitec)$35.00/hr$50.00/hr$85.00/hr1.00 hr
Wafer Photoresist Charges$4.05/run$4.05/run$4.05/run-

Note: The cost of materials and supplies for all standard NNF processes is included in the user fees unless noted otherwise. NNF also offers chemicals and other supplies for sale for non-standard processes and experiments. The sales price of these items is determined by adding a handling fee of 10% to the cost.

1: All users will be charged a "precious metal fee" for special sputtering target materials such as Au and Pt. For industrial users (remote and on-site) this fee is $214.50/deposition run for up to 300nm thickness. For all academic users, the charge is $150.00/deposition run for up to 300nm thickness and this fee is not capped.

2: Users, who need precious metal evaporation (e.g. gold and platinum) in their fabrication processes regularly are expected to purchase their own metal pellets. We use 1/8 inch long, 1/8 inch diameter pellets of 99.99% purity. Users are also recommended to bring their own evaporation crucibles, which eliminates the need of removing the remaining metal from the NNF crucible. NNF will keep a limited supply of gold and platinum for occasional academic and industrial users. The current charge for gold and platinum is $90 / gm. The amount used is determined by weighing the crucible before and after evaporation. Please note that gold can also be deposited by DC Sputtering.

3: All users will be charged an additional materials fee for SiO2 deposition. The fee is $154 per 100nm using diethylsilane, or $75 per 100nm using TEOS.