User Fees
The user rate for each tool can be found under the tools menu. For academic users doing their own processing in the laboratory, the monthly cap is $500 per student per project. This cap is valid for all academic institutions, however, if the processing is carried out by the NNF personnel for a remote academic institution, the monthly cap is $1,000 per student per project. For questions on user rates, please contact the lab manager.
NNF offers free processing to new faculty and undergraduate students. To learn more about these programs, please go back to the home page and click on the "get started" button.
| Academic Rates | Industry Rates | ||||
| Tool | NCSU | On-site Non-NCSU |
Remote Non-NCSU |
On-site | Remote |
| Furnace C1: Forming Gas Anneal - High K | $120.00/run | $120.00/run | $307.92/run | $220.00/run | $407.92/run |
| Furnace C2: SiC | $120.00/run | $120.00/run | $307.92/run | $220.00/run | $407.92/run |
| Furnace C3: Phosphorus Disk Doping | $120.00/run | $120.00/run | $307.92/run | $220.00/run | $407.92/run |
| Furnace C4: Forming Gas Anneal | $120.00/run | $120.00/run | $307.92/run | $220.00/run | $407.92/run |
| Furnace D1: Steam Oxidation | $120.00/run | $120.00/run | $307.92/run | $220.00/run | $407.92/run |
| Furnace D2: Boron Disk Doping | $120.00/run | $120.00/run | $307.92/run | $220.00/run | $407.92/run |
| Furnace D3: Dry Oxidation | $120.00/run | $120.00/run | $307.92/run | $220.00/run | $407.92/run |
| Furnace D4: Drive In Anneal | $120.00/run | $120.00/run | $307.92/run | $220.00/run | $407.92/run |
| Furnace: Lindberg 1 | $30.00/run | $30.00/run | $7.98/run | $71.50/run | $118.48/run |
| Furnace: Lindberg 2 | $30.00/run | $30.00/run | $76.98/run | $71.50/run | $118.48/run |
| Furnace: RTA (Heatpulse 210T) | $30.00/hr | $30.00/hr | $76.98/hr | $71.50/hr | $118.48/hr |
| Hoods: Acid Research (room 227) | $30.00/hr | $30.00/hr | $76.98/hr | $71.50/hr | $118.48/hr |
| Hoods: Develop Photoresist | $30.00/hr | $30.00/hr | $70.00/hr | $71.50/hr | $118.48/hr |
| Hoods: Equipment Clean | $30.00/hr | $30.00/hr | $76.98/hr | $71.50/hr | $118.48/hr |
| Hoods: KOH | $30.00/hr | $30.00/hr | $76.98/hr | $71.50/hr | $118.48/hr |
| Hoods: Liftoff | $30.00/hr | $30.00/hr | $76.98/hr | $71.50/hr | $118.48/hr |
| Hoods: Metal etch, nitride etch | $30.00/hr | $30.00/hr | $76.98/hr | $71.50/hr | $118.48/hr |
| Hoods: Nano strip, BOE | $30.00/hr | $30.00/hr | $76.98/hr | $71.50/hr | $118.48/hr |
| Hoods: Poly, BD Etch, P deglaze | $30.00/hr | $30.00/hr | $76.98/hr | $71.50/hr | $118.48/hr |
| Hoods: SC1&2, JTB | $30.00/hr | $30.00/hr | $76.98/hr | $71.50/hr | $118.48/hr |
| Hoods: Solvent Research (room 227) | $30.00/hr | $30.00/hr | $76.98/hr | $71.50/hr | $112.00/hr |
| Hoods: Spin Dryer | $30.00/hr | $30.00/hr | $76.98/hr | $71.50/hr | $118.48/hr |
| Hoods: TNLC | $30.00/hr | $30.00/hr | $76.98/hr | $71.50/hr | $118.48/hr |
| Hoods: Tube Etcher | $30.00/hr | $30.00/hr | $76.98/hr | $71.50/hr | $118.48/hr |
| Internal Credit | $1.00/run | $1.00/run | $1.00/run | $1.00/run | $1.00/run |
| Metrology: Atomic Force Microscope | $30.00/hr | $30.00/hr | $76.98/hr | $71.50/hr | $118.48/hr |
| Metrology: Ellipsometer (VASE) | $30.00/hr | $30.00/hr | $76.98/hr | $71.50/hr | $118.48/hr |
| Metrology: Four Point Probe | $30.00/hr | $30.00/hr | $76.98/hr | $71.50/hr | $118.48/hr |
| Metrology: General Microscope1 | $0.00/hr | $0.00/hr | $46.98/hr | $0.00/hr | $46.98/hr |
| Metrology: HP 4145 (room 226) | $0.00/hr | $0.00/hr | $0.00/hr | $0.00/hr | $0.00/hr |
| Metrology: HP 4284A LCR | $0.00/hr | $0.00/hr | $0.00/hr | $0.00/hr | $0.00/hr |
| Metrology: Keithley (room 226) | $0.00/hr | $0.00/hr | $0.00/hr | $0.00/hr | $0.00/hr |
| Metrology: Microscope 2 - TNLC | $0.00/hr | $0.00/hr | $46.98/hr | $0.00/hr | $46.98/hr |
| Metrology: Photo Microscope | $0.00/hr | $0.00/hr | $0.00/hr | $0.00/hr | $0.00/hr |
| Metrology: Photo Video Microscope | $0.00/hr | $0.00/hr | $46.98/hr | $0.00/hr | $46.98/hr |
| Metrology: Thickness Measurement (Nanome | $30.00/hr | $30.00/hr | $76.98/hr | $71.50/hr | $118.48/hr |
| Nanolithography: ASML 193 Scanner | $216.00/hr | $216.00/hr | $262.98/hr | $750.00/hr | $796.98/hr |
| Nanolithography: BioForce Enabler | $30.00/hr | $30.00/hr | $76.98/hr | $71.50/hr | $118.48/hr |
| Nanolithography: NanoImprinter | $30.00/hr | $30.00/hr | $76.98/hr | $71.50/hr | $118.48/hr |
| Photolithography: Blue M Oven | $30.00/hr | $30.00/hr | $76.98/hr | $71.50/hr | $118.48/hr |
| Photolithography: Contact Aligner (MA55) | $30.00/hr | $30.00/hr | $76.98/hr | $71.50/hr | $118.48/hr |
| Photolithography: Contact Aligner (MA6) | $30.00/hr | $30.00/hr | $76.98/hr | $71.50/hr | $118.48/hr |
| Photolithography: Contact Aligner (MJB3) | $30.00/hr | $30.00/hr | $76.98/hr | $71.50/hr | $118.48/hr |
| Photolithography: GCA Stepper | $138.00/hr | $138.00/hr | $184.98/hr | $330.00/hr | $376.98/hr |
| Photolithography: Hot Plate (TNLC) | $30.00/hr | $30.00/hr | $76.98/hr | $71.50/hr | $118.48/hr |
| Photolithography:Headway Spin1/Hot Plate | $30.00/hr | $30.00/hr | $76.98/hr | $71.50/hr | $118.48/hr |
| Photolithography:Headway Spin2/Hot Plate | $30.00/hr | $30.00/hr | $76.98/hr | $71.50/hr | $118.48/hr |
| Photolithography:Laurell Spin/Hot Plate | $30.00/hr | $30.00/hr | $76.98/hr | $71.50/hr | $118.48/hr |
| Photololithography: Spin Track | $161.72/hr | $161.72/hr | $211.72/hr | $300.00/hr | $346.98/hr |
| Plasma Processing: O2 clean - Asher | $30.00/hr | $30.00/hr | $76.98/hr | $71.50/hr | $118.48/hr |
| RIE: Deep RIE | $60.00/run | $60.00/run | $106.98/run | $82.50/run | $129.48/run |
| RIE: Plasma therm | $30.00/run | $30.00/run | $76.98/run | $71.50/run | $118.48/run |
| RIE: Semigroup | $30.00/run | $30.00/run | $76.98/run | $71.50/run | $118.48/run |
| RIE: Trion Minilock | $60.00/run | $60.00/run | $106.98/run | $82.50/run | $129.98/run |
| Staff time/tool operation | $46.98/hr | $46.98/hr | $100.52/hr | $100.52/hr | $100.52/hr |
| Thin Film Deposition: (Si/SiGe Epitaxy) | $30.00/hr | $30.00/hr | $76.98/hr | $330.00/hr | $376.98/hr |
| Thin Film Deposition: DC Sputterring | $90.00/run | $90.00/run | $230.94/run | $214.50/run | $355.44/run |
| Thin Film Deposition: E-Beam Evaporator | $90.00/run | $90.00/run | $136.98/run | $214.50/run | $261.48/run |
| Thin Film Deposition: LPCVD Polysilicon | $240.00/run | $240.00/run | $286.98/run | $440.00/run | $486.98/run |
| Thin Film Deposition: LPCVD Si3N4 | $240.00/run | $240.00/run | $296.98/run | $400.00/run | $446.98/run |
| Thin Film Deposition: LPCVD SiO2 | $240.00/run | $240.00/run | $286.98/run | $440.00/run | $486.98/run |
| Thin Film Deposition: PECVD (Solarex) | $30.00/hr | $30.00/hr | $76.98/hr | $71.50/hr | $118.48/hr |
| Thin Film Deposition: RH Evaporator | $90.00/run | $90.00/run | $230.94/run | $214.50/run | $261.48/run |
| Thin Film Deposition: Sputtering (NCSU) | $30.00/run | $30.00/run | $76.98/run | $71.50/run | $118.48/run |
| Wafer Photoresist Charges | $4.05/run | $4.05/run | $4.05/run | $4.05/run | $4.05/run |