NC State University has constructed state-of-the-art cleanroom facilities on the ground floor and plaza level of the Larry K. Monteith Engineering Research Center (MRC). The plaza level cleanroom is a contiguous space consisting of 7,000 square feet containing semiconductor processing, test, and measurement systems. The cleanroom contains 4 gas storage rooms with a total of 31 gas cabinets. The gas storage room is fire rated, and has sprinklers, smoke detection, and its own exhaust ventilation system. The gas storage room is a locked, controlled access space that may not be entered without approval. NCSU Nanofabrication Facility (NNF) and Triangle National Lithography Center include the rooms, MRC 201 – 212 and MRC 227 - 240.
Engineering safeguards incorporated into the facility infrastructure are intended to minimize the hazards associated with chemical and gases used for semiconductor and related processing. Safeguards include gas monitoring systems, fast response smoke detection systems, standardized gas handling apparatus, special ventilation, and emergency power among others. However, no engineered safety system can replace the dedication and attention required of all personnel that work in these facilities to maintain a safe work environment. The cleanroom facilities and personnel working therein are required to meet NC State environmental health and safety protocols (see the EHSC Home Page). It is the responsibility of all personnel using the cleanrooms (faculty, staff, and students) to be familiar with all administrative and safety requirements and to immediately report accidents, injuries, or incidents to the appropriate person(s). Upon completion of reading this manual, a safety test will be given. The test serves a dual purpose. First, it shows that you understand the general safety requirements to work in the facility and second, that you will abide by the rules stated in the manual. This test will be repeated every six months to maintain your access to the laboratory.
After passing the safety test, you will be given a comprehensive tour of the laboratory by the NNF Laboratory Manager . You will be given an ID numberafter successful completion of the safety test. Do not distribute this number. If your number is used while you are logged into the facility, the door system computer will lock up. If this occurs, nobody will have access until system has been reset. Do not forget to logout. The door system will not allow a user back in the facility if they fail to logout.