Gases & Chemicals Used in NNF
ACIDS
Acetic Acid:
- CH3OOH, Vinegar. Pungent odor, like vinegar.
- Hazards: Corrosive, irritant, may cause burns. Do not induce vomiting.
- Flammability: Moderate. Keep away from oxidizers, like peroxides and nitric acid.
- Classification: Organic acid. Handle like solvent.
Aluminum Etch:
- (H3PO4[79%], CH3COOH[5%], HNO3[5%],H2O[11%]). Pungent odor of vinegar.
- Hazards: Corrosive, irritant, can cause burns.
- Flammability: Low
- Classification: Acid
- MSDS
Buffered Oxide Etchant
- NH4F, HF, BOE, Oxide etch. Odorless, colorless liquid.
- Hazards: Skin contact dangerous. See hydrofluoric acid.
- Flammability: Non-flammable.
- Classification: Acid
Hydrochloric Acid
- HCl, Muriatic acid, Hydrogen chloride. Biting odor, colorless
- Hazards: Classification, irritant; may cause burns; do not induce vomiting. Keep away from oxidizers.
- Flammability: Non-flammable
- Classification: Acid
Hydrochloric Etch
- Hydrochloric acid, ferric chloride Biting odor
- Hazards: Corrosive, irritant; may cause burns.
- Flammability: Non-flammable
- Classification: Acid
Hydrofluoric Acid
- Hydrogen fluoride, HF. Odorless, colorless liquid.
- Hazards: Skin or eye contact extremely dangerous. Nothing is felt at first, but after a latent period, excruciatingly painful tissue and bone destruction may occur and may take up to months to heal. Rinse any suspected skin or eye contact. Seek medical attention.
- Flammability: Non-flammable. Release toxic fluoride vapors when heated.
- Classification: Acid
- MSDS
Nitric Acid
- HNO3. aqua fortis.
- Hazards: Corrosive; irritant; may cause burns; stains skin yellow.
- Flammability: Keep away from flammables
- Classification: Acid, Oxidizer
Phosphoric Acid
- H3PO4. Clear, syrupy, colorless liquid.
- Hazards: Corrosive, irritant, may cause burns; do not induce vomiting.
- Flammability: Non-flammable. May emit toxic vapors if heated to decomposition.
- Classification: Acid
Sulfuric Acid
- H2SO4. Oil of vitriol. Colorless, viscous liquid.
- Hazards: Causes severe burns to skin and eyes.
- Flammability: May cause spontaneous ignition of combustible materials.
- Classification: Acid
Trans etch
- H3PO4, phosphoric acid.
- Hazards: Corrosive, irritant, may cause burns.
- Flammability: Non-flammable. Emits toxic vapors if heated to decomposition.
- Classification: Acid
BASES
Ammonium Hydroxide
- NH4OH, Aqua Ammonia. Odor of ammonia.
- Hazards: irritating, caustic to skin, eyes. Do not induce vomiting.
- Flammability: Low, separate from oxidizing agents.
- Classification: Base
- MSDS
Microposist 1165
- Piperazines, N-methly1-2-pyrrolidinone. Slight amine-like odor. Light yellow to colorless. Remover liquid.
- Hazards: Corrosive, irritant, may cause burns. Do not induce vomiting.
- Flammability: Moderate. Thermal decomposition products include carbon monoxide.
- Classification: Organic base.
Positive Photoresist Developer
- Mild alkaline solution. Amine-like odor.
- Hazards: Irritating to skin, eyes and lungs.
- Flammability: Non-flammable
- Classification: Corrosive Alkaline
Potassium Hydroxide
- KOH
- Hazards: Toxic, irritating to skin, eyes and lungs, may cause serious burns
- Flammability: Non-flammable
- Classification: Base
- MSDS
Tetramethyl Ammonium Hydroxide
- Developer.TMAH. Strong amine-like odor, clear to yellow liquid.
- Hazards: Irritant, may cause headache, nausea and weakness.
- Flammability: Non-flammable. DOT Corrosive.
- Classification: Base
- MSDS
HMDS
- Hexamethyldisilazane. Ammonia-like odor, colorless.
- Hazards: Contact with water may release ammonia. May cause irritation, headache or dizziness.
- Flammability: Moderate
- Classification: Solvent (strong base)
SOLVENTS
Acetone:
- (CH3)2CO, Dimethyl ketone. Fragrant, mint-like odor. Highly volatile.
- Hazards: Defats skin; mild irritant; less toxic than most solvents.
- Flammability: DANGEROUS. Keep away from sparks and ignition.
- Classification: Solvent
- MSDS
Ethanol
- C2H5OH, Ethyl alcohol, grain alcohol Sweet pleasant odor.
- Hazards: Normally not very toxic via inhalation. May cause drowsiness, headache.
- Flammability: DANGEROUS. Keep away from sparks and ignition.
- Classification: Solvent
Freon TF
- CCl3CF3, Trifluorotrichloroethane. Ethereal odor. Environmental concern.
- Hazards: Defats skin, irritating to eyes. Higher concentrations may cause dizziness.
- Flammability: Slight, avoid open flames. Decomposition products: HCl, HF and phosgene.
- Classification: Solvent
Isopropyl Alcohol
- C2H4OHCH3. 2-propanol. Slight sweet odor.
- Hazards: Irritant; nervous system depression at higher concentrations.
- Flammability: Flammable. Keep away from oxidizers.
- Classification: Solvent
Methanol
- CH3OH, methyl alcohol, wood alcohol. Colorless liquid. Antidote for ingestion is ethyl alcohol.
- Hazards: Absorbs through skin. May cause headache, dermatitis, visual problems, narcosis, can cause blindness or death.
- Flammability: Dangerous. Keep away from oxidizers.
- Classification: Solvent
- MSDS
Photoresist Positive
- Cellosolve acetate, n-butyl acetate, xylene. Red-purple color.
- Hazards: Absorbs through skin. Irritant and systemic toxin.
- Flammability: Moderate to dangerous
- Classification: Solvent
Ammonium Fluoride:
- NH4F Colorless crystals, soluble in water.
- Hazards: Highly toxic, chronic exposure may result in damage to bones and teeth.
- Flammability: Non-flammable, but may release NH3 and HF at fire temperatures
- Classification: Salt
GASES
Argon
- Ar. No odor
- Hazards: Asphyxiating in concentration.
- Flammability: Non-flammable.
- Classification: Inert gas
Chlorine
- Cl2. Amber liquid or greenish-yellow gas; irritating odor.
- Hazards: Burns eyes, nose, mouth, etc., can cause nausea, choking, vomiting, pulmonary edema, pneumonia.
- Flammability: Not combustible.
- Classification: Oxidizer
Diborane
- B2H6 Colorless, sickly sweet odor.
- Hazards: Highly toxic, irritating to pulmonary, temporary damage to kidneys and liver.
- Flammability: Flammable. Use protein-base foams to extinguish fires never water.
- Classification: Gas
Dichlorosilane
- SiH2Cl2, DCS Colorless, suffocating odor.
- Hazards: Pryrophoric, highly corrosive, treat like silane.
- Flammability: Flammable, liquefied gas.
- Classification: Gas
Disilane
- Si2H6. Silicon hydride
- Hazards: Exposure difficult to determine due to spontaneous combustion.
- Flammability: Extremely flammable. Small leaks can ignite spontaneously in air.
- Classification: Gas
Helium
- He. Colorless, odorless, lighter than air.
- Hazards: May be asphyxiating in very high concentrations.
- Flammability: Non-flammable
- Classification: Gas
Hydrogen
- H2. Colorless, odorless, lighter than air.
- Hazards: Very slight asphyxiant.
- Flammability: DOT: Flammable. Highly dangerous, may explode or burn in contact with oxygen.
- Classification: Gas
Hydrogen Chloride
- HCl. Hydrochloric acid, muriatic acid. Colorless, pungent odor.
- Hazards: Highly corrosive. Skin, eye, and respiratory irritant; highly toxic.
- Flammability: Non-combustible, but contact with metals may release H2.
- Classification: Acid ( Gas cylinder is liquid filled under pressure)
Hydrogen Peroxide
- H2O2. Hydrogen peroxide, peroxide. Heavy liquid. Acrid odor.
- Hazards: Depending on its concentration, can be severely irritating and cause severe burns.
- Flammability: Non-flammable Keep away from solvents and combustible materials. Store one year only.
- Classification: Oxidizers
Nitrogen
- N2. Colorless, odorless
- Hazards: May be asphyxiating in very high concentrations. Liquid nitrogen may cause frostbite or cold burns.
- Flammability: Non-flammable
- Classification: Gas
Nitrous Oxide
- N2O. Laughing gas. Colorless.
- Hazards: Anesthetic, simple asphyxiant.
- Flammability: Moderate, supports combustion, can form explosive mixture.
- Classification: Gas
Oxygen
- O2. Colorless, odorless.
- Hazards: None as gas; however, liquid may cause burns.
- Flammability: High. Supports combustion.
- Classification: Gas
Phosphine
- PH3. Hydrogen phosphide. Colorless, smells like rotten fish.
- Hazards: Very toxic; effects central nervous system and lungs; irritating; blood poison.
- Flammability: Dangerous, extremely flammable.
- Classification: Gas
Silane
- SiH4
- Hazards: Exposure unlikely due to spontaneous combustion.
- Flammability: Extremely flammable. Small leaks can ignite spontaneously in air.
- Classification: Gas
- MSDS
Silicon Tetrachloride
- SiCl4. Silicon chloride. Suffocating odor, colorless liquid.
- Hazards: Severe irritant, emits toxic vapors when heated.
- Flammability: Non-flammable
- Classification: Corrosive liquid.
THE ABOVE INFORMATION IS A BRIEF OVERVIEW AND IS NOT TO REPLACE MATERIAL SAFETY DATA SHEETS.
MSDS'S ARE LOCATED IN SEVERAL LOCATIONS THROUGHOUT THE LAB AND IN 243 EGRC
| Attachment | Size |
|---|---|
| MSDS_SOLVENT_ACETONE.pdf | 48.32 KB |
| MSDS_SOLVENT_METHANOL.pdf | 48.34 KB |
| MSDS_HYDROGEN PEROXIDE_30pct.pdf | 48.36 KB |
| MSDS_ETCHANT_BOE_6_1.pdf | 41.18 KB |
| MSDS_BASE_KOH.pdf | 47.13 KB |
| MSDS_ACID_HYDROFLUORIC.pdf | 52.18 KB |
| MSDS_BASE_AMMONIUM_HYDROXIDE.pdf | 47.17 KB |
| MSDS_ETCHANT_Aluminum_Etchant_TypeA.pdf | 33.78 KB |
