Gases & Chemicals Used in NNF

ACIDS

Acetic Acid:

  • CH3OOH, Vinegar. Pungent odor, like vinegar.
  • Hazards: Corrosive, irritant, may cause burns. Do not induce vomiting.
  • Flammability: Moderate. Keep away from oxidizers, like peroxides and nitric acid.
  • Classification: Organic acid. Handle like solvent.

Aluminum Etch:

  • (H3PO4[79%], CH3COOH[5%], HNO3[5%],H2O[11%]). Pungent odor of vinegar.
  • Hazards: Corrosive, irritant, can cause burns.
  • Flammability: Low
  • Classification: Acid
  • MSDS

Buffered Oxide Etchant

  • NH4F, HF, BOE, Oxide etch. Odorless, colorless liquid.
  • Hazards: Skin contact dangerous. See hydrofluoric acid.
  • Flammability: Non-flammable.
  • Classification: Acid

Hydrochloric Acid

  • HCl, Muriatic acid, Hydrogen chloride. Biting odor, colorless
  • Hazards: Classification, irritant; may cause burns; do not induce vomiting. Keep away from oxidizers.
  • Flammability: Non-flammable
  • Classification: Acid

Hydrochloric Etch

  • Hydrochloric acid, ferric chloride Biting odor
  • Hazards: Corrosive, irritant; may cause burns.
  • Flammability: Non-flammable
  • Classification: Acid

Hydrofluoric Acid

  • Hydrogen fluoride, HF. Odorless, colorless liquid.
  • Hazards: Skin or eye contact extremely dangerous. Nothing is felt at first, but after a latent period, excruciatingly painful tissue and bone destruction may occur and may take up to months to heal. Rinse any suspected skin or eye contact. Seek medical attention.
  • Flammability: Non-flammable. Release toxic fluoride vapors when heated.
  • Classification: Acid
  • MSDS

Nitric Acid

  • HNO3. aqua fortis.
  • Hazards: Corrosive; irritant; may cause burns; stains skin yellow.
  • Flammability: Keep away from flammables
  • Classification: Acid, Oxidizer

Phosphoric Acid

  • H3PO4. Clear, syrupy, colorless liquid.
  • Hazards: Corrosive, irritant, may cause burns; do not induce vomiting.
  • Flammability: Non-flammable. May emit toxic vapors if heated to decomposition.
  • Classification: Acid

Sulfuric Acid

  • H2SO4. Oil of vitriol. Colorless, viscous liquid.
  • Hazards: Causes severe burns to skin and eyes.
  • Flammability: May cause spontaneous ignition of combustible materials.
  • Classification: Acid

Trans etch

  • H3PO4, phosphoric acid.
  • Hazards: Corrosive, irritant, may cause burns.
  • Flammability: Non-flammable. Emits toxic vapors if heated to decomposition.
  • Classification: Acid
BASES

 

Ammonium Hydroxide

  • NH4OH, Aqua Ammonia. Odor of ammonia.
  • Hazards: irritating, caustic to skin, eyes. Do not induce vomiting.
  • Flammability: Low, separate from oxidizing agents.
  • Classification: Base
  • MSDS

Microposist 1165

  • Piperazines, N-methly1-2-pyrrolidinone. Slight amine-like odor. Light yellow to colorless. Remover liquid.
  • Hazards: Corrosive, irritant, may cause burns. Do not induce vomiting.
  • Flammability: Moderate. Thermal decomposition products include carbon monoxide.
  • Classification: Organic base.

Positive Photoresist Developer

  • Mild alkaline solution. Amine-like odor.
  • Hazards: Irritating to skin, eyes and lungs.
  • Flammability: Non-flammable
  • Classification: Corrosive Alkaline
Potassium Hydroxide
  • KOH
  • Hazards: Toxic, irritating to skin, eyes and lungs, may cause serious burns
  • Flammability: Non-flammable
  • Classification: Base
  • MSDS

Tetramethyl Ammonium Hydroxide

  • Developer.TMAH. Strong amine-like odor, clear to yellow liquid.
  • Hazards: Irritant, may cause headache, nausea and weakness.
  • Flammability: Non-flammable. DOT Corrosive.
  • Classification: Base
  • MSDS

HMDS

  • Hexamethyldisilazane. Ammonia-like odor, colorless.
  • Hazards: Contact with water may release ammonia. May cause irritation, headache or dizziness.
  • Flammability: Moderate
  • Classification: Solvent (strong base)
SOLVENTS

 

Acetone:

  • (CH3)2CO, Dimethyl ketone. Fragrant, mint-like odor. Highly volatile.
  • Hazards: Defats skin; mild irritant; less toxic than most solvents.
  • Flammability: DANGEROUS. Keep away from sparks and ignition.
  • Classification: Solvent
  • MSDS

Ethanol

  • C2H5OH, Ethyl alcohol, grain alcohol Sweet pleasant odor.
  • Hazards: Normally not very toxic via inhalation. May cause drowsiness, headache.
  • Flammability: DANGEROUS. Keep away from sparks and ignition.
  • Classification: Solvent

Freon TF

  • CCl3CF3, Trifluorotrichloroethane. Ethereal odor. Environmental concern.
  • Hazards: Defats skin, irritating to eyes. Higher concentrations may cause dizziness.
  • Flammability: Slight, avoid open flames. Decomposition products: HCl, HF and phosgene.
  • Classification: Solvent

Isopropyl Alcohol

  • C2H4OHCH3. 2-propanol. Slight sweet odor.
  • Hazards: Irritant; nervous system depression at higher concentrations.
  • Flammability: Flammable. Keep away from oxidizers.
  • Classification: Solvent

Methanol

  • CH3OH, methyl alcohol, wood alcohol. Colorless liquid. Antidote for ingestion is ethyl alcohol.
  • Hazards: Absorbs through skin. May cause headache, dermatitis, visual problems, narcosis, can cause blindness or death.
  • Flammability: Dangerous. Keep away from oxidizers.
  • Classification: Solvent
  • MSDS

Photoresist Positive

  • Cellosolve acetate, n-butyl acetate, xylene. Red-purple color.
  • Hazards: Absorbs through skin. Irritant and systemic toxin.
  • Flammability: Moderate to dangerous
  • Classification: Solvent

Ammonium Fluoride:

  • NH4F Colorless crystals, soluble in water.
  • Hazards: Highly toxic, chronic exposure may result in damage to bones and teeth.
  • Flammability: Non-flammable, but may release NH3 and HF at fire temperatures
  • Classification: Salt
GASES

Argon

  • Ar. No odor
  • Hazards: Asphyxiating in concentration.
  • Flammability: Non-flammable.
  • Classification: Inert gas

Chlorine

  • Cl2. Amber liquid or greenish-yellow gas; irritating odor.
  • Hazards: Burns eyes, nose, mouth, etc., can cause nausea, choking, vomiting, pulmonary edema, pneumonia.
  • Flammability: Not combustible.
  • Classification: Oxidizer

Diborane

  • B2H6 Colorless, sickly sweet odor.
  • Hazards: Highly toxic, irritating to pulmonary, temporary damage to kidneys and liver.
  • Flammability: Flammable. Use protein-base foams to extinguish fires never water.
  • Classification: Gas

Dichlorosilane

  • SiH2Cl2, DCS Colorless, suffocating odor.
  • Hazards: Pryrophoric, highly corrosive, treat like silane.
  • Flammability: Flammable, liquefied gas.
  • Classification: Gas

Disilane

  • Si2H6. Silicon hydride
  • Hazards: Exposure difficult to determine due to spontaneous combustion.
  • Flammability: Extremely flammable. Small leaks can ignite spontaneously in air.
  • Classification: Gas

Helium

  • He. Colorless, odorless, lighter than air.
  • Hazards: May be asphyxiating in very high concentrations.
  • Flammability: Non-flammable
  • Classification: Gas

Hydrogen

  • H2. Colorless, odorless, lighter than air.
  • Hazards: Very slight asphyxiant.
  • Flammability: DOT: Flammable. Highly dangerous, may explode or burn in contact with oxygen.
  • Classification: Gas

Hydrogen Chloride

  • HCl. Hydrochloric acid, muriatic acid. Colorless, pungent odor.
  • Hazards: Highly corrosive. Skin, eye, and respiratory irritant; highly toxic.
  • Flammability: Non-combustible, but contact with metals may release H2.
  • Classification: Acid ( Gas cylinder is liquid filled under pressure)

Hydrogen Peroxide

  • H2O2. Hydrogen peroxide, peroxide. Heavy liquid. Acrid odor.
  • Hazards: Depending on its concentration, can be severely irritating and cause severe burns.
  • Flammability: Non-flammable Keep away from solvents and combustible materials. Store one year only.
  • Classification: Oxidizers

Nitrogen

  • N2. Colorless, odorless
  • Hazards: May be asphyxiating in very high concentrations. Liquid nitrogen may cause frostbite or cold burns.
  • Flammability: Non-flammable
  • Classification: Gas

Nitrous Oxide

  • N2O. Laughing gas. Colorless.
  • Hazards: Anesthetic, simple asphyxiant.
  • Flammability: Moderate, supports combustion, can form explosive mixture.
  • Classification: Gas

Oxygen

  • O2. Colorless, odorless.
  • Hazards: None as gas; however, liquid may cause burns.
  • Flammability: High. Supports combustion.
  • Classification: Gas

Phosphine

  • PH3. Hydrogen phosphide. Colorless, smells like rotten fish.
  • Hazards: Very toxic; effects central nervous system and lungs; irritating; blood poison.
  • Flammability: Dangerous, extremely flammable.
  • Classification: Gas

Silane

  • SiH4
  • Hazards: Exposure unlikely due to spontaneous combustion.
  • Flammability: Extremely flammable. Small leaks can ignite spontaneously in air.
  • Classification: Gas
  • MSDS

Silicon Tetrachloride

  • SiCl4. Silicon chloride. Suffocating odor, colorless liquid.
  • Hazards: Severe irritant, emits toxic vapors when heated.
  • Flammability: Non-flammable
  • Classification: Corrosive liquid.

THE ABOVE INFORMATION IS A BRIEF OVERVIEW AND IS NOT TO REPLACE MATERIAL SAFETY DATA SHEETS.
MSDS'S ARE LOCATED IN SEVERAL LOCATIONS THROUGHOUT THE LAB AND IN 243 EGRC

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MSDS_SOLVENT_ACETONE.pdf48.32 KB
MSDS_SOLVENT_METHANOL.pdf48.34 KB
MSDS_HYDROGEN PEROXIDE_30pct.pdf48.36 KB
MSDS_ETCHANT_BOE_6_1.pdf41.18 KB
MSDS_BASE_KOH.pdf47.13 KB
MSDS_ACID_HYDROFLUORIC.pdf52.18 KB
MSDS_BASE_AMMONIUM_HYDROXIDE.pdf47.17 KB
MSDS_ETCHANT_Aluminum_Etchant_TypeA.pdf33.78 KB