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Nanofabrication Facility @ NCSU
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Processes
Surface Preparation
Lithographic Processes
Silicon Oxidation
Silicon Doping
Annealing (Furnace & RTA)
Physical Vapor Deposition
Chemical Vapor Deposition
Chemical Etching
Plasma Etching
Fast Silicon Etching
High Aspect Ratio Si Etching
Plasma Etching
Please click on the links under plasma etching to display different recipes.
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