Physical Vapor Deposition
- Evaporation (Resistive Heating)
| Material |
Wafer Diameter (inches) |
Deposition Rate (nm/sec) |
Measurement Method |
| Aluminum |
4 & 6 |
0.6 |
Dektak |
| Titanium |
4 & 6 |
0.3 |
Dektak |
| Chromium |
4 & 6 |
TBD |
|
- Evaporation (Resistive Heating - Glovebox)
| Material |
Wafer Diameter (inches) |
Deposition Rate (nm/sec) |
Measurement Method |
| Aluminum |
4 & 6 and pieces |
0.2 |
Dektak |
- Evaporation (4" E-Beam Evaporator)
| Material |
Wafer Diameter (inches) |
Deposition Rate (nm/sec) |
Measurement Method |
| Chromium |
4 and small pieces |
0.11 |
Crystal |
| Copper |
4 and small pieces |
0.17 |
Crystal |
| Titanium |
4 and small pieces |
0.04 |
Crystal |
| Nickel |
4 and small pieces |
0.01 |
Crystal |
| Gold |
4 and small pieces |
0.3 |
Crystal |
| Silicon |
4 and small pieces |
0.17 |
Crystal |
- Evaporation (6" E-Beam Evaporator)
- We are currently working on collecting data on the evaporation rates of standard materials.
- DC Sputtering
- We are currently working on collecting data on sputtering rates of standard metals.
