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Nanofabrication Facility @ NCSU

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Processes

  • Surface Preparation
  • Lithographic Processes
  • Silicon Oxidation
  • Silicon Doping
  • Annealing (Furnace & RTA)
  • Physical Vapor Deposition
  • Chemical Vapor Deposition
  • Chemical Etching
  • Plasma Etching

Chemical Vapor Deposition

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