Plasma Asher
| The PM-600 is a RF plasma barrel reactor designed for stripping, etching and cleaning. The gas used is Oxygen. System is pumped by a rotary vane mechanical pump. Typical pressure is 50 millitorr. Wafer sizes up to 6 inches are allowed. |
| The PM-600 is a RF plasma barrel reactor designed for stripping, etching and cleaning. The gas used is Oxygen. System is pumped by a rotary vane mechanical pump. Typical pressure is 50 millitorr. Wafer sizes up to 6 inches are allowed. |