Ellipsometer

The Woollam VASE (Variable Angle Spectroscopic Ellipsometer) is used to measure the thickness of various thin films. The range of the Xenon light source is 200-1100nm. Samples up to 8 inches in diameter can be measured. The VASE has a computer controlled stage and an easy-to-use user interface. It can be used to determine the index of refraction of unknown films and has the ability for index of refraction/absorption data to be entered so that very specific films can be measured.

Please click here for a tutorial on ellipsometry created by J.A. Woollam Co. Inc, the manufacturer of the ellipsometer in our laboratory.