The laboratory houses six chemical hoods each dedicated to different processes. Use the links on the left to learn about the construction of the hoods as well as the processes that can be carried out in them.

• Wafer Cleaning
• Polysilicon and Backdoor Etching, Phosphorus Deglaze
• Photoresist Development, Removal and Lift-Off
• Oxide Etching and Photoresist Removal
• Lift-Off
• Aluminum, Titanium and Silicon Nitride Etching

If you are interested in learning more about the hoods, procedures for using them and their safety features, please click on the links below. You will have to pass a written test on this material before you are allowed to use the chemical hoods.

• NNF Wet Benches - Part I
• NNF Wet Benches - Part II
• NNF Wet Benches - Part III

If you are interested in learning how to test the hood exhaust, please click on the link below:

• Hood Exhaust Testing